Shape control of polymer reflow structures fabricated by nanoimprint lithography

Microelectronic Engineering

Volumn 88, Issue 1, 2011, Pages 87-92

  Schift, Helmut ^a   Spreu, Christian ^a   Schleunitz, Arne ^a   Lee, Jaejong ^b  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b Korea Institute of Machine and Materials   (South Korea)

Author keywords

Contact angle; Dewetting; Lenses; Nanoimprint lithography; Reflow; Stamps

Indexed keywords

3D STRUCTURES; BINARY STRUCTURES; DE-WETTING; FEATURE DIMENSIONS; NANO-IMPRINT; POST PROCESSING; POSTPROCESSING METHODS; PRE-FORMS; REFLOW; SHAPE CONTROL; STAMP COPY; STAMPS; THERMAL REFLOW;

ASPECT RATIO; CONTACT ANGLE; LENSES; OPTICAL INSTRUMENTS; PROCESSING; SURFACE ACTIVE AGENTS; SURFACE CHEMISTRY; THREE DIMENSIONAL;

NANOIMPRINT LITHOGRAPHY;

EID: 78049266310     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.08.029     Document Type: Article

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