Micro-ball lens array fabrication in photoresist using PTFE hydrophobic effect

Microsystem Technologies

Volumn 13, Issue 11-12, 2007, Pages 1601-1606

  Shyu, Ruey Fang ^a   Yang, Hsiharng ^b   Tsai, Wen Ren ^b   Tsai, Jhy Cherng ^b  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

LENSES; MICROFABRICATION; POLYTETRAFLUOROETHYLENES; SILICON WAFERS; SUBSTRATES;

MICRO-BALL LENS; THERMAL REFLOW PROCESS;

PHOTORESISTS;

EID: 34249784259     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0265-1     Document Type: Conference Paper

References (14)

1. Ai J, Popelek J, Li Y, Chen RT (1999) Beam-splitting ball lens: a new integrated optical component. Opt Lett 24(21):1478-1480
2. Daly D, Stevens RF, Hutley MC, Davies N (1990) The manufacture of microlens by melting photoresist. Meas Sci Technol 1:759-766
3. Huang LS, Lee SS, Motamedi E, Wu MC, Kim CJ (1998) MEMS packaging for micro mirror switches. In: 48th IEEE in electronic components and technology conference 25-28, pp 592-597
4. Hutley MC, Stevens RF, Daly D (1990) The manufacture of microlens arrays and fan-out gratings in photoresist. In: IEE Colloquium optical connection and switching network for communication and computing, pp 11/1-11/3
5. Lin YS, Pan CT, Lin KL, Chen SC, Yang JJ, Yang JP (2001) Polyimide as the pedestal of batch fabricated micro-ball lens and micro-mushroom array. In: Proceeding of MEMS'2001 conference in interlaken in Switzerland, pp 337-340
6. Popovic ZD, Sprague RA, Connell GAN (1988) Technique for monolithic fabrication of microlens arrays. Appl Opt 27(7):1281-1284
7. Ramos M, Verrier I, Goure JP, Mottier P (1995) Efficient ball lens coupling between a single-mode optical fiber and a silica microguide at 1.3 μm. J Opt Commun 16(5):179-185
8. Ratowsky RP, Yang L, Deri RJ, Kallman JS, Trott G (1995) Ball lens reflections by direct solution Maxwell's equations. Opt Lett 20:2048-2050
9. Ratowsky RP, Yang L, Deri RJ, Chang KW, Kallman JS, Trott G (1997) Laser diode to single-mode fiber ball lens coupling efficiency: full-wave calculation and measurements. Appl Opt 36(15):3435-3438
10. Shen CC, Pan CT, Chou HP (2001) Batch assembly micro ball lens array for Si-based optical coupling platform in free space. Opt Rev 8(5):373-377
11. Tamura Y, Maeda H, Satoh N, Katoh K (1986) Single-mode fiber WDM in the 1.2/1.3μm wavelength region. J Lightwave Technol 4(7):841-845
12. Taniura H, Kojima R, Usui H (2003) Preparation of plastic spherical microlenses by use of a fluoropolymer stencil and oil-bath heating. Appl Opt 42(19):4008-4015
13. Wilson RG (1998) Ball-lens coupling efficiency for laser-diode to single-mode fiber: comparison of independent studies by distinct methods. Appl Opt 37(15):3201-3205
14. Yang H, Chao CK, Lin CP, Shen SC (2004) Micro-ball lens array modeling and fabrication using thermal reflow in two polymer layers. J Micromech Microeng 14(2):277-282