Unique nanopore pattern formation by focused ion beam guided anodization

Nanotechnology

Volumn 21, Issue 40, 2010, Pages

  Tian, Zhi Peng ^a   Lu, Kathy ^a   Chen, Bo ^a  

^a State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIZATIONS; HEXAGONAL PACKING; INTERPORE DISTANCES; LARGE PORES; MONO-SIZED; NEW APPROACHES; PATTERN FORMATION; PATTERN FORMATION MECHANISM; PORE ARRAYS; POROUS TEMPLATES; TECHNICAL CHALLENGES;

ANODIC OXIDATION; BEAM PLASMA INTERACTIONS; FOCUSED ION BEAMS; GRAIN BOUNDARIES; ION BEAM LITHOGRAPHY; ION BOMBARDMENT; IONS;

NANOPORES;

EID: 77958578769     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/40/405301     Document Type: Article

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