Patterning by focused ion beam assisted anodization

Ceramic Transactions

Volumn 223, Issue , 2010, Pages 47-56

  Zhao, J ^a   Lu, K ^a   Chen, B ^a   Tian, Z ^a  

^a Virginia Polytechnic Institute and State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FILMS; FOCUSED ION BEAMS; IONS; LITHOGRAPHY;

ANODIZATIONS; HIGH PURITY ALUMINUM; INITIATION SITES; NANOPATTERNING; NANOPORE ARRAY; NANOSTRUCTURE FORMATION; PORE ARRAYS;

NANOPORES;

EID: 77958539395     PISSN: 10421122     EISSN: None     Source Type: Book Series    
DOI: 10.1002/9780470931011.ch5     Document Type: Conference Paper

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