Gradient and alternating diameter nanopore templates by focused ion beam guided anodization

Electrochimica Acta

Volumn 56, Issue 1, 2010, Pages 435-440

  Chen, Bo ^a   Lu, Kathy ^a   Tian, Zhipeng ^a  

^a Virginia Polytechnic Institute and State University   (United States)

Author keywords

Alternating diameter; Anodization; Focused ion beam lithography; Gradient diameter; Patterning

Indexed keywords

ALTERNATING DIAMETER; ALUMINUM SURFACE; ANODIC ALUMINA; ANODIZATIONS; GRADIENT DIAMETER; INTERPORE DISTANCES; NANOPORE ARRAY; NANOPORE TEMPLATES; ORDERED ARRAY; OXALIC ACID; PATTERNING; SELF-ORGANIZED; UNIFORM PORE;

ALUMINUM; BEAM PLASMA INTERACTIONS; FOCUSED ION BEAMS; ION BOMBARDMENT; IONS; NANOPORES; ORGANIC ACIDS;

ION BEAM LITHOGRAPHY;

EID: 77958541757     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2010.08.057     Document Type: Article

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