Adsorption mechanisms of fluorocarbon polymers at ultra low-k surfaces

Surface Science

Volumn 604, Issue 19-20, 2010, Pages 1808-1812

  Leitsmann, R ^a   Bohm O ^a   Planitz Ph ^a   Radehaus, C ^a   Schaller, M ^c   Schreiber, M ^b  

^a GWT TUD GmbH   (Germany)

^b CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^c GLOBALFOUNDRIES Dresden Module Two GmbH and Co KG   (Germany)

Author keywords

Ab initio; Adsorption; CF polymer; ULK

Indexed keywords

ADSORPTION; FLUORINE CONTAINING POLYMERS; MOLECULES;

AB INITIO; AB INITIO INVESTIGATION; ADSORPTION ENERGIES; ADSORPTION MECHANISM; BONDING MECHANISM; CF-POLYMER; ELECTRON TRANSFER; FLUOROCARBON POLYMERS;

POLYMERS;

EID: 77958077664     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2010.07.011     Document Type: Article

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