Preparation and structure of porous dielectrics by plasma enhanced chemical vapor deposition

Journal of Applied Physics

Volumn 101, Issue 9, 2007, Pages

  Gates, S M ^a   Neumayer, D A ^a   Sherwood, M H ^b   Grill, A ^a   Wang, X ^a   Sankarapandian, M ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

^b IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION TEMPERATURE; HYDROCARBON CONTENT; POROUS DIELECTRICS; POROUS FILMS;

CROSSLINKING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; NUCLEAR MAGNETIC RESONANCE SPECTROSCOPY; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROUS SILICON;

DIELECTRIC MATERIALS;

EID: 34248587495     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2718278     Document Type: Conference Paper

References (20)

1. D. Edelstein, Proceedings of the IEEE 2006 International Interconnect Technology Conference (IEEE, Piscataway, NJ, 2006), p. 214.
2. V. McGahay, Proceedings of the IEEE 2006 International Interconnect Technology Conference (IEEE, Piscataway, NJ, 2004), p. 9.
3. T. Casserly and K. Gleason, Plasma Processes Polym. 2, 679 (2005).
4. A. Grill, J. Appl. Phys. 93, 1785 (2003).
5. A. Grill and V. Patel, Appl. Phys. Lett. 79, 803 (2001).
6. A. Grill and D. Neumayer, J. Appl. Phys. 94, 6697 (2003), and references therein.
7. G. Metz, X. Wu, and S. O. Smith, J. Magn. Reson., Ser. A 110, 219 (1994).
8. A. E. Bennett, C. M. Rienstra, M. Auger, K. V. Lakshmi, and R. G. Griffin, J. Chem. Phys. 103, 6951 (1995).
9. A. L. Smith, Spectrochim. Acta 16, 87 (1960).
10. C. Rau and W. Kulisch, Thin Solid Films 249, 28 (1994).
11. S. Sugahara, T. Kadoya, K. Usami, T. Hattori, and M. Matsumura, J. Electrochem. Soc. 148, F120 (2001).
12. E. A. Williams, The Chemistry of Organic Silicon Compounds, edited by, S. Patai, and, Z. Rappoport, (Wiley, New York, 1989), Chap..
13. H. Marsmann, NMR Basic Principles and Progress (Springer, Berlin, 1981), Vol. 17.
14. P. Mabboux and K. Gleason, J. Electrochem. Soc. 152, F7 (2005).
15. H. C. Marsmann, in Encyclopedia of Nuclear Magnetic Resonance, edited by, D. M. Grant, and, R. K. Harris, (Wiley, Chichester, 1996), pp. 4386-4397.
16. G. E. Maciel and D. W. Sindorf, J. Am. Chem. Soc. 102, 7606 (1980).
17. A. Dilks, S. Kaplan, and A. Van Laeken, J. Polym. Sci., Polym. Chem. Ed. 19, 2987 (1981).
18. A. Grill, B. S. Myerson, V. V. Patel, J. A Reimer, and M. A. Petrich, J. Appl. Phys. 61, 2874 (1987).
19. P. Bornhauser and G. Calzaferri, J. Phys. Chem. 100, 2035 (1996).
20. C. Marcolli and G. Calzaferri, J. Phys. Chem. 101, 4925 (1997).