Zinc oxide targets for magnetron sputtering PVD prepared by plasma spray

Surface and Coatings Technology

Volumn 205, Issue 4, 2010, Pages 1070-1073

  Tului, Mario ^a   Bellucci, Alessandra ^a   Albolino, Augusto ^b   Migliozzi, Giuseppe ^c  

^a CENTRO SVILUPPO MATERIALI S P A   (Italy)

^b ALENIA SPAZIO   (Italy)

^c NONE   (Italy)

Author keywords

Plasma spraying; Resistivity; Sputtering; X ray diffraction; Zinc oxide

Indexed keywords

CERAMIC TARGET; DEPOSITION ATMOSPHERE; DEPOSITION PARAMETERS; ELECTRICAL CONDUCTIVITY; ELECTROMAGNETIC PROPERTIES; INDIUM OXIDE; INERT ATMOSPHERES; METALLIC SUBSTRATE; PLASMA SPRAY; PLASMA SPRAY PROCESS; PLASMA SPRAYING TECHNOLOGY; PLASMA-SPRAYED COATINGS; PVD COATINGS; RESISTIVITY; SEM; TARGET PREPARATION; THIN COATING; TOUCH SCREEN; TRANSPARENT CONDUCTIVE OXIDES; XPS; XRD; ZNO; ZNO LAYERS;

DEPOSITION; DIFFRACTION; ELECTRIC CONDUCTIVITY; ELECTROMAGNETISM; FILM PREPARATION; HALL EFFECT; HUMAN COMPUTER INTERACTION; MAGNETIC FIELD EFFECTS; MAGNETRON SPUTTERING; PLASMA DEPOSITION; PLASMA JETS; PLASMA SPRAYING; PLASMAS; PROTECTIVE COATINGS; SUBSTRATES; X RAY DIFFRACTION; ZINC; ZINC OXIDE;

SPRAYED COATINGS;

EID: 77957915919     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2010.03.034     Document Type: Article

References (18)

1. Granqvist C.G., Hultåker A. Thin solid films 2002, 411:1.
2. Ginley D.S., Bright C. MRS Bullettin August, 2000, 15.
3. Lewis B.G., Paine D.C. MRS Bullettin August, 2000, 22.
4. Betz U., Kharrazi Olsson M., Marthy J., Escolá M.F., Atamny F. Surface and Coatings Technology 2006, 200:5751.
5. Boiadjiev S.I., Dobrikov G.H., Rassovska M.M.M. Thin Solid Films 2007, 515:8465.
6. Bender M., Trube J., Stollenwerk J. Thin Solid Films 1999, 354:100.
7. Matthews S., De Bosscher W., Blondeel A., Van Holsbeke J., Delrue H. Vacuum 2009, 83:518.
8. George J., Menon C.S. Surf. Coat. Technol. 2000, 132:45.
9. Boycheva S., Sytchkova A.K., Grilli M.L., Piegari A. Thin Solid Films 2007, 515:8469.
10. Kuriki S., Kawashima T. Thin Solid Films 2007, 515:8594.
11. Robbins J.J., Woldena C.A. Appl. Phys. Lett. 2003, 83 - 19:3933.
12. Gordon R.G. MRS Bullettin August, 2000, 52.
13. Barquinha P., Gonçalves G., Pereira L., Martins R., Fortunato E. Thin Solid Films 2007, 515:8450.
14. Kiriakidis G., Suchea M., Christoulakis S., Horvath P., Kitsopoulos T., Stoemenos J. Thin Solid Films 2007, 515:8577.
15. Lin K., Tsai P. Thin Solid Films 2007, 515:8601.
16. Ma Z.Q., Zhao W.G., Wang Y. Thin Solid Films 2007, 515:8611.
17. Singh S., Srinivasa R.S., Major S.S. Thin Solid Films 2007, 515:8718.
18. Barin I., Knacke O. Thermochemical Properties of Inorganic Substances 1973, Springer Verlag, Berlin.