Effect of annealing temperature on the properties of IZO films and IZO based transparent TFTs

Thin Solid Films

Volumn 515, Issue 24 SPEC. ISS., 2007, Pages 8450-8454

  Barquinha, P ^a   Goncalves G ^a   Pereira, L ^b   Martins, R ^b   Fortunato, E ^a  

^a DEPARTAMENTO DE CIÊNCIA DOS MATERIAIS   (Portugal)

^b Center of Excellence in Microelectronics Optoelectronics and Processes   (Portugal)

Author keywords

Amorphous semiconductors; Annealing; Sputtering; Transistors; Transparent conductors

Indexed keywords

AMORPHOUS SEMICONDUCTORS; ANNEALING; ELECTRIC CONDUCTIVITY; SEMICONDUCTING INDIUM COMPOUNDS; THIN FILM TRANSISTORS;

OXYGEN ATMOSPHERE; TRANSPARENT CONDUCTORS;

OXIDE FILMS;

EID: 34548852584     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.03.176     Document Type: Article

References (14)

1. Fortunato E., Barquinha P., Pimentel A., Gonçalves A., Marques A., Pereira L., and Martins R. Adv. Mater. 17 (2005) 590
2. Chiang H.Q., Wager J.F., Hoffman R.L., Jeong J., and Keszler D.A. Appl. Phys. Lett. 86 (2005) 1
3. Dehuff N.L., Kettenring E.S., Hong D., Chiang H.Q., Wager J.F., Hoffman R.L., Park C.-H., and Keszler D.A. J. Appl. Phys. 97 (2005) 1
4. Nomura K., Ohta H., Takagi A., Kamiya T., Hirano M., and Hosono H. Nature 432 (2004) 488
5. Barquinha P., Pimentel A., Marques A., Pereira L., Martins R., and Fortunato E. J. Non-Cryst. Solids 352 (2006) 1749
6. Yaglioglu B., Yeom H., Beresford R., and Paine D. Appl. Phys. Lett. 89 (2006) 062103
7. Martins R., Barquinha P., Pimentel A., Pereira L., and Fortunato E. Phys. Status Solidi, A Appl. Res. 202 9 (2005) R95
8. Ito N., Sato Y., Song P., Kaijio A., Inoue K., and Shigesato Y. Thin Solid Films 496 (2006) 99
9. Yaglioglu B., Yeom H., and Paine D. Appl. Phys. Lett. 86 (2005) 261908
10. Hartnagel H., Dawar A., Jain A., and Jagadish C. Semiconducting Transparent Thin Films (1995), Institute of Physics Publishing, Bristol
11. Hamberg I., and Granqvist C. J. Appl. Phys. 60 11 (1986) R123
12. Batzill M., and Diebold U. Prog. Surf. Sci. 79 (2005) 47
13. Cao Y., Miao L., Tanemura S., Kuno Y., Hayashi Y., and Mori Y. Jpn. J. Appl. Phys. 45 3A (2006) 1623
14. Kumar B., Gong H., and Akkipeddi R. J. Appl. Phys. 98 (2005) 073703