New target materials for innovative applications on glass

Vacuum

Volumn 83, Issue 3, 2008, Pages 518-521

  Matthews, Steven ^a   De Bosscher, Wilmert ^a   Blondeel, Anja ^a   Van Holsbeke, John ^a   Delrue, Hilde ^b  

^a Bekaert sa   (Belgium)

^b Codelresearch ^*  (Belgium)

Author keywords

ITO; Rotating cylindrical magnetrons; Silicon; Sputter deposition; Sputter target manufacturing; Thermal spraying; Titanium oxide

Indexed keywords

APPLICATIONS; BUILDING MATERIALS; FLAT PANEL DISPLAYS; MAGNETRONS; OPTICAL COATINGS; OPTICAL GLASS; TARGETS; THICK FILMS;

ITO; ROTATING CYLINDRICAL MAGNETRONS; SILICON; SPUTTER DEPOSITION; SPUTTER TARGET MANUFACTURING; THERMAL SPRAYING; TITANIUM OXIDE;

COATINGS;

EID: 53149095018     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.04.065     Document Type: Article

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