Structural, optical and electrical peculiarities of r.f. plasma sputtered indium tin oxide films

Thin Solid Films

Volumn 515, Issue 24 SPEC. ISS., 2007, Pages 8469-8473

  Boycheva, Sylvia ^a   Sytchkova, Anna Krasilnikova ^b   Grilli, Maria Luisa ^b   Piegari, Angela ^b  

^a TECHNICAL UNIVERSITY OF SOFIA   (Bulgaria)

^b ENEA   (Italy)

Author keywords

Electrical properties; ITO; Optical properties; Structure investigation

Indexed keywords

ELECTRIC PROPERTIES; ELECTRONIC STRUCTURE; GAS MIXTURES; REFRACTIVE INDEX; SPUTTERING; X RAY DIFFRACTION;

INDIUM TIN OXIDE FILMS (ITO); PLASMA SPUTTERED FILMS; STRUCTURE INVESTIGATIONS; THRESHOLD BEHAVIOR;

OXIDE FILMS;

EID: 34548815002     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.03.165     Document Type: Article

References (19)

1. Kim S.H., Park N.-M., Kim T.Y., and Sung G.Y. Thin Solid Films 475 (2005) 262
2. Lii D.-F., Huang J.-L., Jen I.-J., Lin S.-S., and Sajgalik P. Surf. Coat. Technol. 192 (2005) 106
3. Kim D. J. Non-Cryst. Solids 331 (2003) 41
4. May C., and Strümpfel J. Thin Solid Films 351 (1999) 48
5. Baia I., Quintela M., Mendes L., Nunes P., and Martins R. Thin Solid Films 337 (1999) 171
6. Gorjanc T.C., Leong D., Py C., and Roth D. Thin Solid Films 413 (2002) 181
7. Rozati S.M., and Ganj T. Renew. Energy 29 (2004) 1671
8. Hamberg I., and Granavist C.G. J. Appl. Phys. 60 11 (1986) R123
9. Mientus R., and Ellmer K. Surf. Coat. Technol. 142-144 (2001) 748
10. Frank G., and Köstlin H. Appl. Phys., A 27 (1982) 197
11. Bohren C.F., and Huffman D.R. Absorption and Scattering of Light by Small Particles (1998), John Wiley & Sons, Inc. 0-471-05772-X
12. Gonzalez G.B., Mason T.O., Quintana J.P., Warschkow O., Ellis D.E., Hwang J.-H., Hodges J.P., and Jorgensen J.D. J. Appl. Phys. 96 7 (2004) 3912
13. Guillen C., and Herrero J. Thin Solid Films 480/481 (2005) 129
14. Guillen C., and Herrero J. Vacuum 80 (2006) 615
15. Ma H., Cho J.-S., and Park C.-H. Surf. Coat. Technol. 153 (2002) 131
16. Carcia P.F., McLean R.S., Reilly M.H., Li Z.G., Pillione L.J., and Messier R.F. J. Vac. Sci. Technol., A, Vac. Surf. Films 21 (2003) 745
17. Jun S.I., McKnight T.E., Simpson M.L., and Rack P.D. Thin Solid Films 476 (2005) 59
18. Lee H.C., and Park O.O. Vacuum 77 (2004) 69
19. Jung Y.S., and Lee S.S. J. Cryst. Growth 259 (2003) 343