Deposition of transparent and conducting indium-tin-oxide films by the r.f.-superimposed DC sputtering technology

Thin Solid Films

Volumn 354, Issue 1, 1999, Pages 100-105

  Bender, M ^a   Trube, J ^b   Stollenwerk, J ^b  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^b Balzers Prozeß Systeme GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; SPUTTER DEPOSITION;

TRANSPARENT CONDUCTING MATERIALS;

CONDUCTIVE FILMS;

EID: 0033359718     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00558-1     Document Type: Article

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