A multi-probe correlated bulk defect characterization scheme for ultra-thin high-κ dielectric

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2010, Pages 1069-1072

  Masuduzzaman, M ^a   Islam, A E ^a   Alam, M A ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

Bulk trap; Charge pumping; Correlated probing; High k dielectric; Random telegraph noise; Stress induced leakage current; Trap profiling

Indexed keywords

BULK TRAPS; CHARGE PUMPING; CORRELATED PROBING; HIGH-K DIELECTRIC; RANDOM TELEGRAPH NOISE; STRESS INDUCED LEAKAGE CURRENT; TRAP PROFILING;

HAFNIUM COMPOUNDS; LEAKAGE CURRENTS; LOGIC GATES; PUMPS; SILICON COMPOUNDS; TELEGRAPH;

ELECTROMAGNETIC INDUCTION;

EID: 77957906398     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IRPS.2010.5488673     Document Type: Conference Paper

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