Investigating polysilicon thin film structural changes during rapid thermal annealing of a thin film crystalline silicon on glass solar cell

Journal of Materials Science: Materials in Electronics

Volumn 21, Issue 10, 2010, Pages 994-999

  Brazil, Ian ^a   Green, Martin A ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

COLUMNAR GRAIN; ELECTRON BACK SCATTER DIFFRACTION; FILM MODULUS; FILM STRUCTURE; GLASS SOLAR CELLS; GRAIN DIMENSION; POLYSILICON THIN FILMS; POST ANNEALING; PREFERRED ORIENTATIONS; QUALITATIVE CHANGES; STRUCTURAL CHANGE; THIN FILM CRYSTALLINE SILICON;

CRYSTALLINE MATERIALS; GLASS; POLYSILICON; RAPID THERMAL PROCESSING; SEMICONDUCTING SILICON COMPOUNDS; SOLAR CELLS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; VAPOR DEPOSITION;

RAPID THERMAL ANNEALING;

EID: 77957899750     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-010-0062-6     Document Type: Article

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