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Volumn B, Issue , 2003, Pages 1251-1254
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Microstructual investigation of polycrystalline silicon thin films re-crystalized by laser-diode
a
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRON BACKSCATTERED DIFFRACTION MEASUREMENT (EBSD);
LASER DIODE LIGHT;
CRYSTAL ORIENTATION;
CRYSTALLIZATION;
ELECTRON DIFFRACTION;
GRAIN SIZE AND SHAPE;
MICROSTRUCTURE;
POLYCRYSTALLINE MATERIALS;
POLYSILICON;
SEMICONDUCTOR LASERS;
THIN FILMS;
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EID: 6344258585
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (5)
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