Fine frequency selection techniques for aluminum nitride lamb wave resonators

2010 IEEE International Frequency Control Symposium, FCS 2010

Volumn , Issue , 2010, Pages 9-13

  Yen, Ting Ta ^a   Lin, Chih Ming ^a   Lai, Yun Ju ^a   Wittwer, Damien ^a   Hopcroft, Matthew A ^a   Pisano, Albert P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Aluminum nitride (AlN); Channel select; Filter bank; Lamb wave mode resonator (LWR); Narrow band

Indexed keywords

ALN; CENTER FREQUENCY; CHANNEL-SELECT; FREQUENCY SELECTION; INTERDIGITAL TRANSDUCER; LAMB WAVE MODE; LAMB WAVE RESONATORS; NARROW BANDS; POST PROCESS; RELATIVE FREQUENCIES; RESONATOR PARAMETERS;

ACOUSTIC SURFACE WAVE DEVICES; ALUMINUM; ELASTIC WAVES; FILTER BANKS; NITRIDES; RESONATORS; SULFUR COMPOUNDS; ULTRASONIC TRANSDUCERS; ULTRASONIC WAVES;

ALUMINUM NITRIDE;

EID: 77957876445     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2010.5556384     Document Type: Conference Paper

References (13)

1. C. T.-C. Nguyen, "Frequency-selective MEMS for miniaturized lowpower communication devices," IEEE Trans. Microwave Theory Tech., vol. 47, no. 8, pp. 1486-1503, 1999.
2. S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "Self-swiching vibrating micromechanical filter bank," in Proc., Joint IEEE Int. Frequency Control/Precision Time & Time Intercal Symp., 2005, pp. 135-141, 2005.
3. H. Chandrahalim, D. Weinstein, L. F. Cheow, and S. A. Bhave, "Channel-select micromechanical filters using high-K dielectrically transduced MEMS resonators," in Tech. Dig., 19th IEEE Int. Conf. Micro Elctro Mech. Syst. 2006, pp. 894-897, 2006.
4. G. Piazza, P. J. Stephanou, and A. P. Pisano, "Single-chip multiplefrequency AlN MEMS filters based on contour-mode piezoelectric resonators," Journal of MicroElectroMechanical Systems, vol. 16, no.2, pp. 319-328, April 2007.
5. V. Yantchev and I. Katardjiev, "Micromachined thin film plate acoustic resonators utilizing the lowest order symmetric Lamb wave mode," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 54, no. 1, pp. 87-95, Jan. 2007.
6. J. H. Kuypers, C.-M. Lin, G. Vigevani, and A. P. Pisano, "Intrinsic temperature compensation of aluminum nitride Lamb wave resonators for multiple-frequency references," in Proc. IEEE Freq. Contr. Symp. 2008, pp. 240-249, 2008.
7. C.-M. Lin, T.-T. Yen, Y.-J. Lai, V. V. Felmetsger, M. A. Hopcroft, J. H. Kuypers, and A. P. Pisano, "Temperature-compensated aluminum nitride Lamb wave resonators," IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 57, no. 3, pp. 524-532, Mar. 2010.
8. T.-T. Yen, C.-M. Lin, X. Zhao, V. V. Felmetsger, D. G. Senesky, M. A. Hopcroft, and A. P. Pisano, "Characterization of aluminum nitride Lamb wave resonators operating at 600°C for harsh environment RF applications," in Tech. Dig., 23th IEEE Int. Conf. Micro Elctro Mech. Syst. 2010, pp. 731-734, 2010.
9. R. Ruby, R. Parker, D. Feld, "Method of extracting unloaded Q applied across different resonator technologies," in Proc., 2008 IEEE Int. Ultrasonic Symp., pp. 1815-1818, 2008.
10. G. Piazza, P. J. Stephanou, A. P. Pisano, "One and two port piezoelectric higher order contour-mode MEMS resonators for mechanical siganl processing," Solid-State Electronics 51 (2007) pp. 1596-1608, 2007.
11. J. H. Kuypers and A. P. Pisano, "Interpolation technique for fast analysis of surface acoustic wave and Lamb wave devices," Japanese Journal of Applied Physics 48 (2009) 07GG07, 2009.
12. S. Pourkamali and F. Ayazi, "Electrically coupled MEMS bandpass filters; Part I: With coupling element," Sensors and Actuators A, 122 (2005), pp. 307-316, Aug. 2005.
13. C. Zuo, N. Sinha, M. B. Pisani, C. R. Perez, R. Mahameed, and G. Piazza, "Channel-select RF MEMS filters based on self-coupled AlN contour-mode piezoelectric resonators," in Proc., 2007 IEEE Int. Ultrasonic Symp., pp. 1156-1159, 2007.