Nanotrench for nano and microparticle electrical interconnects

Nanotechnology

Volumn 21, Issue 33, 2010, Pages

  Dayen, J F ^a   Faramarzi, V ^a   Pauly, M ^a   Kemp, N T ^a   Barbero, M ^a   Pichon, B P ^a   Majjad, H ^a   Begin Colin, S ^a   Doudin, B ^a  

^a INSTITUT DE PHYSIQUE ET CHIMIE DES MATÉRIAUX DE STRASBOURG   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL CONDUCTIVITY; ELECTRICAL INTERCONNECTS; ELECTRICAL PROPERTY; HIGH ASPECT RATIO; LOW IMPEDANCE; METAL-COATED; MICRO AND NANO-PARTICLE; MICRO PARTICLES; NANOTRENCHES; OPTICAL LITHOGRAPHY; PARALLEL PROCESSING; PROCESS USE; SEPARATION DISTANCES; WET PROCESS;

ELECTRIC CONDUCTIVITY; IRON ORES; NANOPARTICLES; PHOTOLITHOGRAPHY;

ASPECT RATIO;

EID: 77957854966     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/33/335303     Document Type: Article

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