Integration of a fabrication process for an aluminum single-electron transistor and a scanning force probe for tuning-fork-based probe microscopy

Journal of Microelectromechanical Systems

Volumn 19, Issue 5, 2010, Pages 1088-1097

  Suter, Kaspar ^a   Akiyama, Terunobu ^a   De Rooij, Nicolaas F ^a   Huefner, Magdalena ^b   Ihn, Thomas ^b   Staufer, Urs ^c  

^a EPFL   (Switzerland)

^b ETH ZURICH   (Switzerland)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

Electron beam lithography (EBL); micromachining; microscopy; nanolithography; single electron transistor (SET)

Indexed keywords

COULOMB DIAMONDS; FABRICATION PROCESS; FORCE SENSOR; HIGH QUALITY; INTEGRATION TECHNIQUES; MICROFABRICATED CANTILEVERS; MICROMECHANICAL STRUCTURES; MICROSCOPY; PROBE MICROSCOPY; QUANTUM DEVICE; SCANNING FORCE MICROSCOPES; SCANNING FORCE PROBES; SCANNING PROBES; SELF-SENSING; SHARP EDGES; SINGLE ELECTRON; TUNING FORKS; TUNING-FORK; VOLUME PRODUCTION;

CAPACITANCE MEASUREMENT; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRONS; FABRICATION; MICROMACHINING; NANOLITHOGRAPHY; PROBES; SCANNING; SENSORS; TRANSIENTS; TUNING;

SINGLE ELECTRON TRANSISTORS;

EID: 77957600822     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2067198     Document Type: Article

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