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Volumn 21, Issue 5, 2003, Pages 2138-2141
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Fabrication of metallic tunnel junctions for the scanning single electron transistor atomic force microscope
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
COULOMB BLOCKADE;
ELECTRON BEAM LITHOGRAPHY;
GRAIN GROWTH;
PHOTOLITHOGRAPHY;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
REACTIVE ION ETCHING;
SCANNING ELECTRON MICROSCOPY;
THERMODYNAMIC STABILITY;
SCANNING SINGLE ELECTRON TRANSISTOR ATOMIC FORCE MICROSCOPE;
SINGLE ELECTRON TRANSISTORS;
TUNNEL JUNCTIONS;
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EID: 0242677560
PISSN: 10711023
EISSN: None
Source Type: Journal
DOI: 10.1116/1.1612931 Document Type: Article |
Times cited : (6)
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References (19)
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