Fast, high-resolution atomic force microscopy using a quartz tuning fork as actuator and sensor

Journal of Applied Physics

Volumn 82, Issue 3, 1997, Pages 980-984

  Edwards, Hal ^a   Taylor, Larry ^a   Duncan, Walter ^a   Melmed, Allan J ^b  

^a TEXAS INSTRUMENTS   (United States)

^b Johns Hopkins University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000650299     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.365936     Document Type: Article

References (14)

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5. J.-K. Leong and C. C. Williams, Appl. Phys. Lett. 66, 1432 (1995); S. R. Manalis, S. C. Minne, and C. F. Quate, Appl. Phys. Lett. 68, 871 (1996).
6. J.-K. Leong and C. C. Williams, Appl. Phys. Lett. 66, 1432 (1995); S. R. Manalis, S. C. Minne, and C. F. Quate, Appl. Phys. Lett. 68, 871 (1996).
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8. TappingMode, TESP, NanoScope, and LiftMode are trademarks of Digital Instruments, Inc., Santa Barbara, CA.
9. The results contained in this article were previously presented by Hal Edwards and Walter Duncan in an oral presentation in session NS-MoM at American Vacuum Society National Symposium, Philadelphia, PA, October 14, 1996.
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14. Roland E. Best, Phase-Locked Loops: Theory, Design, and Applications, 2nd edition (McGraw-Hill, Inc., New York, 1993).