A Resonant microaccelerometer with high sensitivity operating in an oscillating circuit

Journal of Microelectromechanical Systems

Volumn 19, Issue 5, 2010, Pages 1140-1152

  Comi, Claudia ^a   Corigliano, Alberto ^a   Langfelder, Giacomo ^a   Longoni, Antonio ^a   Tocchio, Alessandro ^a   Simoni, Barbara ^b  

^a POLITECNICO DI MILANO   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

High sensitivity; oscillating circuit; resonant accelerometers

Indexed keywords

FREQUENCY VARIATION; GEOMETRICAL DESIGNS; GRAVITY ACCELERATION; HIGH SENSITIVITY; MICRO ACCELEROMETERS; MICROMACHINED; OSCILLATING CIRCUITS; PROOF MASS; RESONANCE FREQUENCIES; RESONANT ACCELEROMETER; RESONANT ACCELEROMETERS; RESONANT FREQUENCIES; STIFFNESS VARIATIONS; THEORETICAL PREDICTION; WORKING PRINCIPLES;

AXIAL LOADS; NATURAL FREQUENCIES;

ACCELEROMETERS;

EID: 77957596940     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2010.2067437     Document Type: Article

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