A new two-beam differential resonant micro accelerometer

Proceedings of IEEE Sensors

Volumn , Issue , 2009, Pages 158-163

  Comi, Claudia ^a   Corigliano, Alberto ^a   Langfelder, Giacomo ^a   Longoni, Antonio ^a   Tocchio, Alessandro ^a   Simoni, Barbara ^b  

^a POLITECNICO DI MILANO   (Italy)

^b STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL SENSITIVITY; DIFFERENTIAL STRUCTURE; LINEAR RANGE; MICRO ACCELEROMETERS; NONLINEAR BEHAVIOR; RESONANCE FREQUENCIES; RESONANT ACCELEROMETER; SEISMIC MASS; STIFFNESS VARIATIONS; TWO BEAMS; WORKING PRINCIPLES;

ACCELEROMETERS; NATURAL FREQUENCIES; SEISMOLOGY; STIFFNESS;

SENSORS;

EID: 77951132393     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2009.5398209     Document Type: Conference Paper

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