Ionization by radio frequency inductively coupled plasma

Thin Films

Volumn 27, Issue C, 2000, Pages 37-66

  Rossnagel, Stevi ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 77957067830     PISSN: 10794050     EISSN: None     Source Type: Book Series    
DOI: 10.1016/S1079-4050(00)80005-8     Document Type: Article

References (24)

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