Radial uniformity of an external-coil ionized physical vapor deposition source

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 2, 1998, Pages 523-531

  Dickson, M ^a   Zhong, G ^a   Hopwood, J ^a  

^a NORTHEASTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000441339     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589856     Document Type: Article

References (24)

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