Surface potential due to charge accumulation during vacuum ultraviolet exposure for high-k and low-k dielectrics

Applied Physics Letters

Volumn 97, Issue 7, 2010, Pages

  Ren, H ^a   Sinha, H ^a   Sehgal, A ^a   Nichols, M T ^a   Antonelli, G A ^b   Nishi, Y ^c   Shohet, J L ^a  

^a Wisconsin Electric Machines and Power Electronics Consortium   (United States)

^b Novellus Systems   (United States)

^c STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE ACCUMULATION; IN-SITU; IN-SITU MONITORING; LOW K DIELECTRICS; NET CHARGES; PHOTOINJECTION CURRENT; STEADY-STATE VALUES; SUBSTRATE CURRENT; SURFACE-POTENTIAL MEASUREMENTS; THIN DIELECTRIC FILM; VACUUM ULTRAVIOLET IRRADIATION; VACUUM ULTRAVIOLETS;

DIELECTRIC FILMS; ELECTRIC FIELD EFFECTS; IRRADIATION; SURFACE POTENTIAL; VACUUM;

SURFACE PROPERTIES;

EID: 77956013899     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3481079     Document Type: Article

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