XPS study of diamond-like carbon-based nanocomposite films

International Journal of Nanoscience

Volumn 3, Issue 6, 2004, Pages 797-802

  Zhang, S ^a   Fu, Y Q ^b   Bui, X L ^a   Du, H J ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b SINGAPORE MIT ALLIANCE   (Singapore)

Author keywords

Diamond like carbon; Nanocomposite; Sputtering; XPS

Indexed keywords

CHEMICAL PROPERTIES; COMPOSITION SYSTEMS; NANOCOMPOSITE FILMS; NANOCRYSTALLINE PHASES;

AMORPHOUS MATERIALS; CONCENTRATION (PROCESS); DOPING (ADDITIVES); MAGNETRON SPUTTERING; METALLIC FILMS; MONOCHROMATORS; NANOSTRUCTURED MATERIALS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND LIKE CARBON FILMS;

EID: 21144449207     PISSN: 0219581X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0219581X04002693     Document Type: Article

References (14)

1. J. Musil, Surf. Coat. Technol. 125, 322 (2000).
2. S. Veprek and S. Reiprich, Thin Solid Films 268, 64 (1995).
3. S. Veprek and A. S. Argon, Surf. Coat. Technol. 146-147, 175 (2001).
4. S. Zhang, D. Sun, Y. Q. Fu and H. J. Du, Surf. Coat. Technol. 167, 113 (2003).
5. F. Vaz, L. Rebouta and P. Goudeau, Surf. Coat. Technol. 146, 274 (2001).
6. J. Musil and H. Hruby, Thin Solid Films 36, 104 (2000).
7. J. Musil, P. Karvankova and J. Kasl, Surf. Coat. Technol. 139, 101 (2001).
8. S. Zhang, Y. Q. Fu, H. J. Du, X. T. Zeng and Y. C. Liu, Surf. Coat. Technol. 162, 42 (2002).
9. S. Veprek and M. Haussmann, Surf. Coat. Technol. 86-87, 394 (1996).
10. S. Zhang, X. L. Bui and Y. Q. Fu, Thin Solid Films 467, 261 (2004).
11. J. Kovac et al., J. Appl. Phys. 86, 5566 (1999).
12. F. Esaka et al., J. Vac. Sci. Technol. A 15, 2521 (1997).
13. M. Delfino, J. A. Fair and D. Hodul, J. Appl. Phys. 71, 6079 (1992).
14. I. Strydom and S. Hofmann, J. Electron. Spectroscopy. Relat. Phenom. 56, 85 (1991).