Epitaxial growth of cubic AlN films on SrTiO3(1 0 0) substrates by pulsed laser deposition

Journal of Crystal Growth

Volumn 310, Issue 4, 2008, Pages 731-737

  Zhu, J ^a   Zhao, D ^a   Luo, W B ^a   Zhang, Y ^a   Li, Y R ^a  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

A3. Film; A3. Pulsed laser deposition; B1. SrTiO3; B2. Cubic AlN

Indexed keywords

ATOMIC FORCE MICROSCOPY; EPITAXIAL GROWTH; PULSED LASER DEPOSITION; SUBSTRATES; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMBIENT NITROGEN PRESSURES; CUBIC ALN; FILM CRYSTALLINE QUALITY;

THIN FILMS;

EID: 38649111974     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2007.11.147     Document Type: Article

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