Oxidation behaviour of nanoscale multilayer CrAlYN/CrN coatings deposited by the combined high power impulse magnetronsputtering/unbalanced magnetron sputtering technique

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Reinhard, Christina ^a   Ehiasarian, Arutiun P ^a   Hovsepian, Papken Eh ^a  

^a SHEFFIELD HALLAM UNIVERSITY   (United Kingdom)

Author keywords

Films; Heat treatment; Nanolayers; Plasma etching; Transmission electron microscopy

Indexed keywords

ALN; COATING DEPOSITION; COATING STRUCTURES; CRALYN/CRN; CROSS SECTIONAL TRANSMISSION ELECTRON MICROSCOPY; HIGH-ADHESION; HIGH-POWER; ISOTHERMAL HEAT-TREATMENT; NANOLAYERS; NANOSCALE MULTILAYERS; OXIDATION BEHAVIOURS; OXIDE LAYER; PRE-TREATMENT; SUBSTRATE PRETREATMENT; SUBSTRATE SURFACE AREA; UNBALANCED MAGNETRON SPUTTERING;

CHROMIUM; EPITAXIAL GROWTH; FILM PREPARATION; MAGNETRONS; MULTILAYERS; NANOSTRUCTURED MATERIALS; PLASMA DIAGNOSTICS; PLASMA ETCHING; PLASMAS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

CHROMATE COATINGS;

EID: 50949084590     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200732204     Document Type: Conference Paper

References (15)

1. O. Banakh, P. E. Schmid, R. Sanjines, F. Levy, Surf. Coat. Technol. 2003, 163-164, 57.
2. J. Vetter, E. Lugscheider, S. S. Guerreiro, Surf. Coat. Technol. 1998, 98, 1233.
3. M. Brizuela, A. Garcia-Luis, I. Braceras, J. I. Onate, J. C. Sanchez-Lopez, D. Martinez-Martinez, C. Lopez-Cartes, A. Fernandez, Surf. Coat. Technol. 2005, 200, 192.
4. L. A. Donohue, I. J. Smith, W.-D. Münz, I. Petrov, J. E. Greene, Surf. Coat. Technol. 1997, 94-95, 226.
5. C. Leyens, M. Peters, P. Eh. Hovsepian, D. B. Lewis, Q. Luo, W.-D. Münz, Surf. Coat. Technol. 2002, 155, 103.
6. S. A. Barnett, "Mechanic and Dielectric Properties", in: Physics of Thin Films M. H. Francombe, J. L. Vossen, Eds., Vol. 17, Academic Press, Boston 1993, pp. 2.
7. P. Eh. Hovsepian, W.-D. Münz, Vacuum 2002, 69, 27.
8. A. P. Ehiasarian, W.-D. Münz, L. Hultman, U. Helmersson, I. Petrov, Surf. Coat. Technol. 2003, 163-164, 267.
9. EP 02 011 204.1 (2002) Invs.: W.-D. Münz, A. P. Ehiasarian, P. Eh. Hovsepian.
10. US 10718435 (2005) Invs.: A. P. Ehiasarian, P. Eh. Hovsepian, W.-D. Münz.
11. A. P. Ehiasarian, P. Eh. Hovsepian, M. Lattemann, J. Böhlmark, U. Helmersson, 48th Annual Technical Conference Proceedings, Denver, CO, USA 2005, p. 480.
12. P. Eh. Hovsepian, C. Reinhard, A. P. Ehiasarian, Surf. Coat. Technol., in press.
13. W.-D. Münz, D. Schulze, F. J. M. Hauzer, Surf. Coat. Technol. 1992, 50, 169.
14. W. C. Oliver, G. M. Pharr, J. Mater. Res. 1992, 7, 1564.
15. P. H. Mayrhofer, H. Willmann, C. Mitterer, Surf. Coat. Technol. 2001, 146-147, 222.