Deposition of Al-doped and Al, Sc-co-doped zinc oxide films by RF- and DC-sputtering of the ZnO and Al-xSc (x = 0, 0.4, 0.8 and 1.7 wt.%) targets

Surface and Coatings Technology

Volumn 202, Issue 22-23, 2008, Pages 5480-5483

  Lin, Jing Chie ^a   Peng, Kun Cheng ^a   Tseng, C A ^a   Lee, Sheng Long ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

Al; Columnar grains; Conductivity; Corrosion resistance; Sc co doped ZnO; Transparent conducting films

Indexed keywords

ADSORPTION; ALUMINUM; ELECTRIC CONDUCTIVITY; ELECTRIC FAULT CURRENTS; OXIDES; SCANDIUM; SEMICONDUCTING ZINC COMPOUNDS; SPUTTER DEPOSITION; TARGETS; X RAY ANALYSIS; ZINC; ZINC ALLOYS; ZINC OXIDE; ZINC SULFIDE;

AL; BLUE SHIFTING; CO-DOPED; COLUMNAR GRAINS; CONDUCTIVITY; CORROSION RESISTANCE; DC-SPUTTERING; ELECTRICAL CONDUCTIVITY; HEXAGONAL WURTZITE; RED SHIFTING; RF-SPUTTERING; SC-CO-DOPED ZNO; TRANSMISSION ELECTRON MICROSCOPY (TEM); TRANSPARENT CONDUCTING FILMS; X-RAY DIFFRACTION; ZINC OXIDE FILMS;

OXIDE FILMS;

EID: 50349098932     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.06.088     Document Type: Article

References (16)

1. May C., Menner R., Strümpfel J., Oertel M., and Sprecher B. Surf. Coat. Technol. 169-170 (2003) 512-516
2. Lee H.W., Lau S.P., Wang Y.G., Tse K.Y., Hng H.H., and Tay B.K. J. Cryst. Growth 268 (2004) 596-601
3. Minami T., Yamamoto T., and Miyata T. Thin Solid Films 366 (2000) 63-68
4. Minami T., Sonohara H., Kakumu T., and Takata S. Jpn. J. Appl. Phys. 34 (1995) L971
5. Minami T., Kakumu T., Shimokawa K., and Takata S. Thin Solid Films 317 (1998) 318
6. Suzuki S., Miyata T., Ishii M., and Minami T. Thin Solid Films 434 (2003) 14-19
7. Minami T., Suzuki S., and Miyata T. Thin Solid Films 53 (2001) 398-399
8. Lin J.C., Peng K.C., Liao H.L., and Lee S.L. Thin Solid Films 516 (2008) 5349-5354
9. Manifacier J.C., Gasiot J., and Fillard J.P. J. Phys. E 9 (1976) 1002
10. Pankove J.I. Optical Processes in Semiconductors (1971), Prentice-Hall, Englewood Cliffs 34
11. Sernelius B.E., Berggren K.F., Jin Z.C., Hamberg I., and Granqvist C.G. Phys. Rev. B 37 (1988) 10244
12. Mollwo E. In: Breckenridge R.G., Russell B.R., and Hahn E.E. (Eds). Proceedings of Photoconductivity Conference (1954), Wiley, New York 509
13. Igasaki Y., and Saito N. Thin Solid Films 199 (1991) 223
14. Reddy A.S., Rao G.V., Uthanna S., and Reddy P.S. Phys., B 370 (2005) 29
15. Moulder J.F., Stickle W.F., Sobol P.E., and Bomben K.D. Handbook of X-ray 265 photoelectron spectroscopy. In: Chastain J., and King R.C. (Eds). A reference 266 book of standard spectra for identification and interpretation of XPS data 267 (1995), Physical Electronics Inc. 268
16. Chen M., Wang X., Yu Y.H., Pei Z.L., Bai X.D., Sun C., Huang R.F., and Wen L.S. 269. Appl. Surf. Sci. 158 (2000) 134