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Applied Surface Science

Volumn 257, Issue 1, 2010, Pages 87-92

Crack-free micromachining on glass substrates by visible LIBWE using liquid metallic absorbers

(6) Yen, Meng Hua a,b Huang, Ching Wen a,b Hsu, Wen Chi b Young, Tai Horng a Zimmer, Klaus e Cheng, Ji Yen b,c,d

a NATIONAL TAIWAN UNIVERSITY (Taiwan)

b RESEARCH CENTER FOR APPLIED SCIENCES (Taiwan)

c NATIONAL TAIWAN OCEAN UNIVERSITY (Taiwan)

d NATIONAL YANG MING UNIVERSITY (Taiwan)

e LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM (Germany)

Author keywords

Eutectic In Ga; Gallium; Glass machining; LIBWE; Liquid assisted ablation; Metallic absorber; Micromachining; Visible laser; Visible LIBWE

Indexed keywords

ASPECT RATIO; COMPOSITE MICROMECHANICS; CRACKS; EUTECTICS; FUSED SILICA; GALLIUM; GLASS; HEAT AFFECTED ZONE; INDIUM; LASER APPLICATIONS; MICROMACHINING; QUARTZ; SUBSTRATES;

LASER DIRECT-WRITE TECHNIQUE; LASER-INDUCED BACKSIDE WET ETCHINGS; LIBWE; METALLIC ABSORBERS; OPTICAL QUALITY SURFACES; TRANSPARENT MATERIAL; VISIBLE LASERS; VISIBLE LIBWE;

WET ETCHING;

EID: 77955516301 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2010.06.041 Document Type: Article

Times cited : (21)

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