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Volumn 162, Issue 2-3, 2003, Pages 189-193
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Effect of N2 partial pressure on the microstructure and mechanical properties of magnetron sputtered CrNx films
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Author keywords
CrNx films; Magnetron sputtering; Mechanical properties; N2 partial pressure
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Indexed keywords
CHROMIUM COMPOUNDS;
ELASTIC MODULI;
ENERGY DISPERSIVE SPECTROSCOPY;
MAGNETRON SPUTTERING;
MICROHARDNESS;
MICROSTRUCTURE;
PARTIAL PRESSURE;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION ANALYSIS;
PEAK HARDNESS VALUE;
COATINGS;
SPUTTERING;
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EID: 0037454528
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(02)00667-9 Document Type: Article |
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Times cited : (88)
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References (15)
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