SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 474, Issue 1-2, 2005, Pages 119-126

Comparative study of chromium nitride coatings deposited by unbalanced and balanced magnetron sputtering

(4) Olaya, J J a Rodil, S E a Muhl, S a Sanchez E a

a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO (Mexico)

Author keywords

Corrosion; Nitrides; Photoelectron spectroscopy; Sputtering

Indexed keywords

COATINGS; CORROSION; CRYSTAL ORIENTATION; ELECTRIC POTENTIAL; ELECTROCHEMISTRY; MAGNETIC FIELDS; MAGNETRON SPUTTERING; MICROSTRUCTURE; NITRIDES; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHROMIUM NITRIDE (CRN) COATINGS; ELECTROCHEMICAL METHODS; FILM MICROSTRUCTURE; MAGNETIC FIELD GEOMETRY;

CHROMIUM COMPOUNDS;

EID: 10844235631 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2004.08.067 Document Type: Article

Times cited : (118)

References (53)

1
- 0033358298
- K. Dyrda, M. Sayer, Thin Solid Films 355/356 (1999) 277.
- (1999) Thin Solid Films , vol.355-356 , pp. 277
- Dyrda, K.¹ Sayer, M.²

2
- 0036670866
- P.H. Mayrhofer, F. Kunc, J. Musil, C. Mitterer, Thin Solid Films 415 (2002) 151.
- (2002) Thin Solid Films , vol.415 , pp. 151
- Mayrhofer, P.H.¹ Kunc, F.² Musil, J.³ Mitterer, C.⁴

3
- 0031098214
- I.J. Smith, D. Gillibrand, J.S. Brooks, W.-D. Munz, S. Harvey, R. Goodwin, Surf. Coat. Technol. 90 (1997) 164.
- (1997) Surf. Coat. Technol. , vol.90 , pp. 164
- Smith, I.J.¹ Gillibrand, D.² Brooks, J.S.³ Munz, W.-D.⁴ Harvey, S.⁵ Goodwin, R.⁶

4
- 0030399712
- G.A. Lausmann, Surf. Coat. Technol. 86/87 (1996) 814.
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 814
- Lausmann, G.A.¹

5
- 0028671273
- A. Darbeida, J. von Stebut, M. Bathole, P. Belliard, L. Lelait, G. Zacharie, Surf. Coat. Technol. 68/69 (1994) 582.
- (1994) Surf. Coat. Technol. , vol.68-69 , pp. 582
- Darbeida, A.¹ Von Stebut, J.² Bathole, M.³ Belliard, P.⁴ Lelait, L.⁵ Zacharie, G.⁶

6
- 0037094322
- L.H. Chiu, C.F. Yang, W.C. Hsieh, A.S. Cheng, Surf. Coat. Technol. 154 (2002) 282.
- (2002) Surf. Coat. Technol. , vol.154 , pp. 282
- Chiu, L.H.¹ Yang, C.F.² Hsieh, W.C.³ Cheng, A.S.⁴

7
- 0033077866
- P. Engel, G. Schwarz, G.K. Wolf, Surf. Coat. Technol. 112 (1999) 286.
- (1999) Surf. Coat. Technol. , vol.112 , pp. 286
- Engel, P.¹ Schwarz, G.² Wolf, G.K.³

8
- 0034310530
- L. Cunha, M. Andriatschky, K. Pischow, Z. Wang, A. Zarychta, A.S. Miranda, A.M. Cunha, Surf. Coat. Technol. 133/134 (2000) 61.
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 61
- Cunha, L.¹ Andriatschky, M.² Pischow, K.³ Wang, Z.⁴ Zarychta, A.⁵ Miranda, A.S.⁶ Cunha, A.M.⁷

9
- 0343851562
- B. Navinsek, P. Panjan, I. Milosev, Surf. Coat. Technol. 116/119 (1999) 476.
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 476
- Navinsek, B.¹ Panjan, P.² Milosev, I.³

10
- 0035386111
- C. Nouveau, M.A. Djouadi, C. Decès-Petit, P. Beer, M. Lambertin, Surf. Coat. Technol. 142/144 (2001) 94.
- (2001) Surf. Coat. Technol. , vol.142-144 , pp. 94
- Nouveau, C.¹ Djouadi, M.A.² Decès-Petit, C.³ Beer, P.⁴ Lambertin, M.⁵

11
- 0032684632
- E. Broszeit, C. Friedrich, G. Berg, Surf. Coat. Technol. 115 (1999) 9.
- (1999) Surf. Coat. Technol. , vol.115 , pp. 9
- Broszeit, E.¹ Friedrich, C.² Berg, G.³

12
- 0035387377
- P.H. Mayrhofer, G. Tischler, C. Mitterer, Surf. Coat. Technol. 142/144 (2001) 78.
- (2001) Surf. Coat. Technol. , vol.142-144 , pp. 78
- Mayrhofer, P.H.¹ Tischler, G.² Mitterer, C.³

13
- 0035795104
- J.W. Seok, N.M. Jadeed, R.Y. Lin, Surf. Coat. Technol. 138 (2001) 14.
- (2001) Surf. Coat. Technol. , vol.138 , pp. 14
- Seok, J.W.¹ Jadeed, N.M.² Lin, R.Y.³

14
- 0035506137
- G. Wei, A. Rar, J.A. Barnard, Thin Solid Films 398/399 (2001) 460.
- (2001) Thin Solid Films , vol.398-399 , pp. 460
- Wei, G.¹ Rar, A.² Barnard, J.A.³

15
- 0033701559
- X.M. He, N. Baker, B.A. Kehler, K.C. Walter, M. Nastasi, Y. Nakamura, J. Vac. Sci. Technol., A 18 (2000) 30.
- (2000) J. Vac. Sci. Technol., A , vol.18 , pp. 30
- He, X.M.¹ Baker, N.² Kehler, B.A.³ Walter, K.C.⁴ Nastasi, M.⁵ Nakamura, Y.⁶

16
- 0032635374
- T. Hurkmans, D.B. Lewis, H. Paritong, J.S. Brooks, W.D. Munz, Surf. Coat. Technol. 114 (1999) 52.
- (1999) Surf. Coat. Technol. , vol.114 , pp. 52
- Hurkmans, T.¹ Lewis, D.B.² Paritong, H.³ Brooks, J.S.⁴ Munz, W.D.⁵

17
- 0037904174
- M.J. Jung, K.H. Nam, Y.M. Jung, J.G. Han, Surf. Coat. Technol. 171 (2003) 59.
- (2003) Surf. Coat. Technol. , vol.171 , pp. 59
- Jung, M.J.¹ Nam, K.H.² Jung, Y.M.³ Han, J.G.⁴

18
- 0042829199
- P.H. Mayrhofer, C. Mitterer, J. Musil, Surf. Coat. Technol. 174/175 (2003) 725.
- (2003) Surf. Coat. Technol. , vol.174-175 , pp. 725
- Mayrhofer, P.H.¹ Mitterer, C.² Musil, J.³

19
- 0142087594
- I. Petrov, P.B. Barna, L. Hultman, J.E. Greene, J. Vac. Sci. Technol., A 21 (2003) 117.
- (2003) J. Vac. Sci. Technol., A , vol.21 , pp. 117
- Petrov, I.¹ Barna, P.B.² Hultman, L.³ Greene, J.E.⁴

20
- 0033896905
- P.J. Kelly, R.D. Arnell, Vacuum 56 (2000) 159.
- (2000) Vacuum , vol.56 , pp. 159
- Kelly, P.J.¹ Arnell, R.D.²

21
- 0002367696
- W. Ensinger, Surf. Coat. Technol. 99 (1998) 1.
- (1998) Surf. Coat. Technol. , vol.99 , pp. 1
- Ensinger, W.¹

22
- 0032183380
- P.J. Kelly, R.D. Arnell, Surf. Coat. Technol. 108/109 (1998) 317.
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 317
- Kelly, P.J.¹ Arnell, R.D.²

23
- 0003400638
- John Wiley & Sons, USA
- B. Chapman, Glow Discharge Processes: Sputtering and Plasma Etching, John Wiley & Sons, USA, 1980, p. 169.
- (1980) Glow Discharge Processes: Sputtering and Plasma Etching , pp. 169
- Chapman, B.¹

24
- 0037891498
- E. Camps, R. Ordaza, G. Anguiano, Rev. Mex. Fis. 38 (1992) 825.
- (1992) Rev. Mex. Fis. , vol.38 , pp. 825
- Camps, E.¹ Ordaza, R.² Anguiano, G.³

25
- 0141692527
- Standard reference test method for making potentiostatic and potentiodynamic anodic polarization measurements
- ASTM G5-94 02 Wear and Erosion; Metal Corrosion
- ASTM G5-94 "Standard reference test method for Making Potentiostatic and Potentiodynamic Anodic Polarization Measurements", Annual Book of ASTM standards 2000, vol. 3, 02 Wear and Erosion; Metal Corrosion, p. 57.
- Annual Book of ASTM Standards 2000 , vol.3 , pp. 57

26
- 0002674873
- T. Fukai, K. Matsumoto, Corros. Eng. 41 (1992) 903.
- (1992) Corros. Eng. , vol.41 , pp. 903
- Fukai, T.¹ Matsumoto, K.²

27
- 0000564197
- T. Okamoto, M. Fukushima, K. Takizawa, Corros. Eng. 45 (1996) 425.
- (1996) Corros. Eng. , vol.45 , pp. 425
- Okamoto, T.¹ Fukushima, M.² Takizawa, K.³

28
- 0037375642
- W.J. Chou, G.P. Yu, J.H. Huang, Surf. Coat. Technol. 167 (2003) 59.
- (2003) Surf. Coat. Technol. , vol.167 , pp. 59
- Chou, W.J.¹ Yu, G.P.² Huang, J.H.³

29
- 84943750081
- B. Window, N. Saavides, J. Vac. Sci. Technol., A 4 (1986) 196.
- (1986) J. Vac. Sci. Technol., A , vol.4 , pp. 196
- Window, B.¹ Saavides, N.²

30
- 0003459529
- Physical Electronics Division, Perkin-Elmer, CT
- C.D. Wagner, Handbook of X-ray Photoelectron Spectroscopy, Physical Electronics Division, Perkin-Elmer, CT, 1992.
- (1992) Handbook of X-ray Photoelectron Spectroscopy
- Wagner, C.D.¹

31
- 0032591107
- C. Emery, A.R. Chourasia, P. Yashar, J. Electron. Spectrosc. Relat. Phenom. 104 (1999) 91.
- (1999) J. Electron. Spectrosc. Relat. Phenom. , vol.104 , pp. 91
- Emery, C.¹ Chourasia, A.R.² Yashar, P.³

32
- 0037214830
- S. Han, J.H. Lin, G.H. Wang, H.C. Shih, Mater. Lett. 57 (2003) 1202.
- (2003) Mater. Lett. , vol.57 , pp. 1202
- Han, S.¹ Lin, J.H.² Wang, G.H.³ Shih, H.C.⁴

33
- 0003427458
- Prentice Hall, Upper Saddle River, NJ
- B.R. Cullity, S.R. Stock, Elements of X-ray Diffraction, 3er ed., Prentice Hall, Upper Saddle River, NJ, 2001.
- (2001) Elements of X-ray Diffraction, 3er Ed.
- Cullity, B.R.¹ Stock, S.R.²

34
- 0037154914
- R. Banerjee, R. Chandra, P. Ayyub, Thin Solid Films 405 (2002) 64.
- (2002) Thin Solid Films , vol.405 , pp. 64
- Banerjee, R.¹ Chandra, R.² Ayyub, P.³

35
- 0033882382
- P. Patsalas, C. Charitidis, L. Logothetidis, Surf. Coat. Technol. 125 (2000) 335.
- (2000) Surf. Coat. Technol. , vol.125 , pp. 335
- Patsalas, P.¹ Charitidis, C.² Logothetidis, L.³

36
- 0004071199
- Card No. 11-0065
- International Centre for Diffraction Data, Joint Committee on Powder Diffraction Standards (JCPDS) database. Card No. 11-0065.
- Joint Committee on Powder Diffraction Standards (JCPDS) Database

37
- 0000073841
- G.G. Stoneys, Proc. R. Soc. Lond., SER 82 (1909) 172.
- (1909) Proc. R. Soc. Lond., SER , vol.82 , pp. 172
- Stoneys, G.G.¹

38
- 0033361223
- L. Cunha, M. Andritschky, K. Pischow, Z. Wang, Thin Solid Films 255/356 (1999) 465.
- (1999) Thin Solid Films , vol.255-356 , pp. 465
- Cunha, L.¹ Andritschky, M.² Pischow, K.³ Wang, Z.⁴

39
- 0031396868
- B. Navinsek, P. Panjan, I. Milosev, Surf. Coat. Technol. 97 (1997) 182.
- (1997) Surf. Coat. Technol. , vol.97 , pp. 182
- Navinsek, B.¹ Panjan, P.² Milosev, I.³

40
- 0000978538
- J.-S. Chun, I. Petrov, I.E. Greene, J. Appl. Phys. 86 (7) (1999) 3633.
- (1999) J. Appl. Phys. , vol.86 , Issue.7 , pp. 3633
- Chun, J.-S.¹ Petrov, I.² Greene, I.E.³

41
- 18744364749
- C.-S. Shin, D. Gall, Y.-W. Kim, N. Hellgren, I. Petrov, J.E. Greene, J. Appl. Phys. 92 (2002) 5084.
- (2002) J. Appl. Phys. , vol.92 , pp. 5084
- Shin, C.-S.¹ Gall, D.² Kim, Y.-W.³ Hellgren, N.⁴ Petrov, I.⁵ Greene, J.E.⁶

42
- 0038650933
- D. Gall, S. Kodambaka, M.A. Wall, I. Petrov, J.E. Greene, J. Appl. Phys. 93 (2003) 9086.
- (2003) J. Appl. Phys. , vol.93 , pp. 9086
- Gall, D.¹ Kodambaka, S.² Wall, M.A.³ Petrov, I.⁴ Greene, J.E.⁵

43
- 0030383010
- C. Gautier, H. Moussaoi, F. Elstner, J. Machet, Surf. Coat. Technol. 86-87 (1996) 254.
- (1996) Surf. Coat. Technol. , vol.86-87 , pp. 254
- Gautier, C.¹ Moussaoi, H.² Elstner, F.³ Machet, J.⁴

44
- 0029633289
- R. Manaila, D. Biro, P. Barna, M. Adamik, F. Zavaliche, S. Craciun, A. Devenyi, Appl. Surf. Sci. 91 (1995) 295.
- (1995) Appl. Surf. Sci. , vol.91 , pp. 295
- Manaila, R.¹ Biro, D.² Barna, P.³ Adamik, M.⁴ Zavaliche, F.⁵ Craciun, S.⁶ Devenyi, A.⁷

45
- 0347362367
- A.A. Adjaottor, E.I. Meletis, S. Logothetidis, I. Alexandrou, S. Kokkou, Surf. Coat. Technol. 76/77 (1995) 142.
- (1995) Surf. Coat. Technol. , vol.76-77 , pp. 142
- Adjaottor, A.A.¹ Meletis, E.I.² Logothetidis, S.³ Alexandrou, I.⁴ Kokkou, S.⁵

46
- 0030736570
- L. Combadiere, J. Machet, Surf. Coat. Technol. 88 (1996) 28.
- (1996) Surf. Coat. Technol. , vol.88 , pp. 28
- Combadiere, L.¹ Machet, J.²

47
- 0021470433
- H.M. Gabriel, K.H. Kloos, Thin Solid Films 118 (1984) 243.
- (1984) Thin Solid Films , vol.118 , pp. 243
- Gabriel, H.M.¹ Kloos, K.H.²

48
- 0017719586
- J.A. Thornton, Annu. Rev. Mater. Sci. 7 (1977) 239.
- (1977) Annu. Rev. Mater. Sci. , vol.7 , pp. 239
- Thornton, J.A.¹

49
- 0030736570
- L. Combadiere, J. Machet, Surf. Coat. Technol. 88 (1996) 28.
- (1996) Surf. Coat. Technol. , vol.88 , pp. 28
- Combadiere, L.¹ Machet, J.²

50
- 0001254055
- K.-H. Muller, J. Appl. Phys. 58 (1985) 2573.
- (1985) J. Appl. Phys. , vol.58 , pp. 2573
- Muller, K.-H.¹

51
- 0030887637
- Z. Zhang, M.G. Lagally, Science 276 (1997) 377.
- (1997) Science , vol.276 , pp. 377
- Zhang, Z.¹ Lagally, M.G.²

52
- 0031213191
- H. Uchida, S. Inoue, K. Koterazawa, Mater. Sci. Eng., A Struct. Mater.: Prop. Microstruct. Process. 234/236 (1997) 649.
- (1997) Mater. Sci. Eng., A Struct. Mater.: Prop. Microstruct. Process. , vol.234-236 , pp. 649
- Uchida, H.¹ Inoue, S.² Koterazawa, K.³

53
- 0037084805
- Y.M. Chen, G.P. Yu, J.H. Huang, Surf. Coat. Technol. 150 (2002) 309.
- (2002) Surf. Coat. Technol. , vol.150 , pp. 309
- Chen, Y.M.¹ Yu, G.P.² Huang, J.H.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.