Mechanically coupled comb drive mems stages

2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS

Volumn , Issue , 2008, Pages 140-141

  Arslan, Aslihan ^a   Ataman, Çaǧlar ^a   Holmstrom, Sven ^a   Hedsten, Karin ^b   Seren, H Rahmi ^a   Urey, Hakan ^a   Enoksson, Peter ^b  

^a KOÇ UNIVERSITY   (Turkey)

^b CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

Author keywords

Electrostatic actuation; Mechanical coupling; MEMS stage

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; PHOTONICS; SCANNING;

APPLICATIONS.; COMB DRIVES; ELECTROSTATIC; ELECTROSTATIC ACTUATION; LARGE STROKES; MECHANICAL COUPLING; NOVEL ACTUATIONS;

MEMS;

EID: 54049109712     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2008.4607868     Document Type: Conference Paper

References (2)

1. A. Akatay, C. Ataman, H. Urey, "Design and optimization of microlens array based high resolution beam steering system," Opt. Lett, Vol. 15, pp. 4523-4529, 2007
2. A.D. Yalcinkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, "Two-Axis Electromagnetic Microscanner for High Resolution Displays," J. MEMS, Vol. 15, No. 4, August 2006