MEVVA ion source development and its industrial applications at Beijing Normal University

Surface and Coatings Technology

Volumn 193, Issue 1-3 SPEC. ISS., 2005, Pages 65-68

  Liu, An Dong ^a   Zhang, H X ^a   Zhang, T H ^a  

^a BEIJING NORMAL UNIVERSITY   (China)

Author keywords

Industrial application; Mevva ion source

Indexed keywords

INDUSTRIAL APPLICATIONS; IONS; MODIFICATION;

ION IMPLANTERS; ION SOURCE DEVELOPMENT;

ION IMPLANTATION;

VAPOR DEPOSITION;

EID: 13844255015     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.07.057     Document Type: Review

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