Nano-sized silver patterning using nano-lnk with an indirect patterning method of nanoimprint and lift-off processes

Journal of Nanoscience and Nanotechnology

Volumn 10, Issue 5, 2010, Pages 3232-3235

  Kim, Young Ja ^a   Park, Soo Yeon ^b   Lee, Jae Jong ^a,b  

^a Korea Institute of Machine and Materials   (South Korea)

^b University of Science and Technology (UST)   (South Korea)

Author keywords

Conductive circuit; Lift Off; Nanoimprint lithography; Patterning; Silver nano ink

Indexed keywords

CONDUCTIVE CIRCUIT; LIFT-OFF PROCESS; LOW DENSITY; LOW OPERATING TEMPERATURE; METAL FILM; METAL PATTERNING; METAL PATTERNS; NANO PATTERN; NANO-IMPRINT; NANO-IMPRINTING; NANO-INK; NANO-SIZED; PATTERNING; PATTERNING METHODS; PATTERNING PROCESS; POLYMER PATTERNS; SI WAFER; SILVER FILM;

INK; METALLIC FILMS; METALS; NANOIMPRINT LITHOGRAPHY; POLYMERS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

SILVER;

EID: 77955003255     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2010.2256     Document Type: Conference Paper

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