Nanostructured substrates for high density protein arrays

Microelectronic Engineering

Volumn 85, Issue 5-6, 2008, Pages 1370-1374

  Zoller, Frank A ^a,b   Padeste, Celestino ^a   Ekinci, Yasin ^a,c   Solak, Harun H ^a   Engel, Andreas ^b  

^a PAUL SCHERRER INSTITUTE   (Switzerland)

^b UNIVERSITY OF BASEL   (Switzerland)

^c ETH ZURICH   (Switzerland)

Author keywords

EUV interference lithography; Glancing angle deposition; Gold nanodot array; Selective protein immobilization

Indexed keywords

CELL IMMOBILIZATION; LIGHT SOURCES; LITHOGRAPHY; MICROARRAYS; NANOSTRUCTURES; REACTIVE ION ETCHING; SILICON WAFERS; SUBSTRATES;

GLANCING ANGLE DEPOSITION; GOLD NANODOT ARRAYS; INTERFERENCE LITHOGRAPHY; SELECTIVE PROTEIN IMMOBILIZATION;

PROTEINS;

EID: 44349099133     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.12.061     Document Type: Article

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