Electron mobility in amorphous silicon thin-film transistors under compressive strain

Applied Physics Letters

Volumn 79, Issue 20, 2001, Pages 3347-3349

  Gleskova, H ^a   Wagner, S ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035851452     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1418254     Document Type: Article

References (17)

1. H. Gleskova and S. Wagner, IEEE Electron Device Lett. 20, 473 (1999).
2. E. Y. Ma and S. Wagner, Appl. Phys. Lett. 74, 2661 (1999).
3. Z. Suo, E. Y. Ma, H. Gleskova, and S. Wagner, Appl. Phys. Lett. 74, 1177 (1999).
4. H. Gleskova, S. Wagner, and Z. Suo, Appl. Phys. Lett. 75, 3011 (1999).
5. H. Gleskova, S. Wagner, V. Gašparik, and P. Kováč, J. Electrochem. Soc. 148, G370 (2001).
6. M. Vaněček, J. Kočka, J. Stuchlík, Z. Kožíšek, O. Štika, and A. Tříska, Sol. Energy Mater. 8, 411 (1983).
7. F. Urbach, Phys. Rev. 92, 1324 (1953).
8. C. R. Wronski, Z. E. Smith, S. Aljishi, V. Chu, K. Shepard, D. S. Shen, R. Schwarz, D. Slobodin, and S. Wagner, AIP Conf. Proc. 157, 70 (1987).
9. S. M. Sze, Semiconductor Devices-Physics and Technology (AT&T Bell Laboratories, Murray Hill, NJ, 1985), p. 206.
10. F. Jansen and M. A. Machonkin, J. Vac. Sci. Technol. A 6, 1696 (1988); for Kapton E: J. A. Kreuz, S. N. Milligan, and R. F. Sutton, DuPont Films Technical Paper No. 3/94, Reorder No. H-54504.
11. F. Jansen and M. A. Machonkin, J. Vac. Sci. Technol. A 6, 1696 (1988); for Kapton E: J. A. Kreuz, S. N. Milligan, and R. F. Sutton, DuPont Films Technical Paper No. 3/94, Reorder No. H-54504.
12. S. Sherman, P. Y. Lu, R. A. Gottscho, and S. Wagner, Mater. Res. Soc. Symp. Proc. 377, 749 (1995).
13. S. Sherman, S. Wagner, and R. A. Gottscho, Appl. Phys. Lett. 69, 3242 (1996).
14. G. D. Cody, T. Tiedje, B. Abeles, B. Brooks, and Y. Goldstein, Phys. Rev. Lett. 47, 1480 (1981).
15. B. Welber and M. H. Brodsky, Phys. Rev. B 16, 3660 (1977).
16. L. Tanaka, Solid State Commun. 60, 295 (1986).
17. P. Alpuim, V. Chu, and J. P. Conde, Mater. Res. Soc. Symp. Proc. 664, (2001) (to be published).