MBE growth of cubic AlN on 3C-SiC substrate

Physica Status Solidi (A) Applications and Materials Science

Volumn 207, Issue 6, 2010, Pages 1365-1368

  Schupp, Thorsten ^a   Rossbach, Georg ^b   Schley, Pascal ^b   Goldhahn, Rüdiger ^b   Rp̈ppischer, Marcus ^c   Esser, Norbert ^c   Cobet, Christoph ^c   Lischka, Klaus ^a   As, Donat Josef ^a  

^a UNIVERSITY OF PADERBORN   (Germany)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^c ISAS INSTITUTE FOR ANALYTICAL SCIENCES   (Germany)

Author keywords

AlN; Growth; MBE; Morphology; Optical properties; Structure

Indexed keywords

ALN; ALN LAYERS; ATOMICALLY SMOOTH SURFACE; CRITICAL POINTS; CUBIC ALN; CUBIC LATTICE; CUBIC STRUCTURE; DIELECTRIC FUNCTIONS; ELECTRON ENERGIES; GROWTH; HIGH ENERGY; HIGH QUALITY; HIGH-RESOLUTION X-RAY DIFFRACTION; LATTICE PARAMETERS; MBE GROWTH; PLASMA-ASSISTED MOLECULAR BEAM EPITAXY; ROOM TEMPERATURE; SIC SUBSTRATES;

ADSORPTION; ATOMIC FORCE MICROSCOPY; CRYSTAL GROWTH; EQUATIONS OF STATE; MOLECULAR BEAM EPITAXY; MOLECULAR BEAMS; MORPHOLOGY; SILICON CARBIDE; SUBSTRATES; X RAY DIFFRACTION;

OPTICAL PROPERTIES;

EID: 77954258408     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200983437     Document Type: Article

References (15)

1. J. A. Majewski, G. Zander, and P. Vogl, Phys. Status Solidi A 179, 285 (2000).
2. D. J. As, Microelectron. J. 40, 204 (2009).
3. B. Daudin and F. Widmann, J. Cryst. Growth 182, 1 (1997).
4. V. Lebedev, V. Cimalla, U. Kaiser, Ch. Foerster, J. Pezoldt, J. Biskupek, and O. Ambacher, J. Appl. Phys. 97, 114306 (2005).
5. J. Schp̈rmann, D. J. As, K. Lischka, P. Schley, R. Goldhahn, S. F. Li, W. Lp̈ffler, M. Hetterich, and H. Kalt, Appl. Phys. Lett. 89, 261903 (2006).
6. D. J. As, S. Potthast, J. Schp̈rmann, S. F. Li, K. Lischka, H. Nagasawa, M. Abe, Mater. Sci. Forum 527, 1489 (2006).
7. W. Braun, Applied RHEED, Springer Tracts in Modern Physics, Vol. 154 (Springer, Berlin, 1999).
8. T. Schupp, G. Rossbach, P. Schley, R. Goldhahn, K. Lischka, and D. J. As, Phys. Status Solidi C, 7, 17 (2010).
9. J. Schp̈rmann, S. Potthast, D. J. As, and K. Lischka, Appl. Phys. Lett. 90, 041918 (2007).
10. V. Holy, High-Resolution X-Ray Scattering from Thin Films and Multilayers, Springer Tracts Mod. Phys. 149 (Springer, Berlin, 1999).
11. C. Cobet, R. Goldhahn, W. Richter, and N. Esser, Phys. Status Solidi B 246, 1440 (2009).
12. R. Goldhahn, Acta Phys. Pol. A 104, 123 (2003).
13. M. Rp̈ppischer, R. Goldhahn, G. Rossbach, P. Schley, C. Cobet, N. Esser, T. Schupp, K. Lischka, and D. J. As, J. Appl. Phys. 106, 076104 (2009).
14. R. A. R. Leute, M. Feneberg, R. Sauer, K. Thonke, S. B. Thapa, F. Scholz, Y. Taniyasu, and M. Kasu, Appl. Phys. Lett. 95, 031903 (2009).
15. F. Bechstedt, K. Seino, P. H. Hahn, and W. G. Schmidt, Phys. Rev. B 72, 245114 (2005).