Capacitive humidity sensing behavior of ordered Ni/Si microchannel plate nanocomposites

Sensors and Actuators, A: Physical

Volumn 160, Issue 1-2, 2010, Pages 48-53

  Miao, Fengjuan ^a,b   Tao, Bairui ^a,b   Sun, Li ^b   Liu, Tao ^b   You, Jinchuan ^b   Wang, Lianwei ^b   Chu, Paul K ^c  

^a QIQIHAR UNIVERSITY   (China)

^b EAST CHINA NORMAL UNIVERSITY   (China)

^c CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Electroless plating; Humidity sensors; Nanostructures; Ni Si MCP

Indexed keywords

COATED MATERIALS; ELECTROLESS PLATING; ENERGY DISPERSIVE SPECTROSCOPY; HUMIDITY SENSORS; MICROCHANNELS; NANOCOMPOSITES; NANOSTRUCTURES; NICKEL; NICKEL COATINGS; PLATES (STRUCTURAL COMPONENTS); POROUS SILICON; SCANNING ELECTRON MICROSCOPY; SILICON; X RAY SPECTROSCOPY;

CAPACITIVE HUMIDITY SENSING; ENERGY DISPERSIVE X RAY SPECTROSCOPY; FAST RESPONSE TIME; HUMIDITY SENSING; MACROPOROUS STRUCTURES; MICRO CHANNEL PLATE; SILICON MICROCHANNELS; STRUCTURAL AND MORPHOLOGICAL PROPERTIES;

IMAGE STORAGE TUBES;

EID: 77954244407     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2010.03.010     Document Type: Article

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