A very sensitive porous silicon based humidity sensor

Sensors and Actuators, B: Chemical

Volumn 111-112, Issue SUPPL., 2005, Pages 135-139

  Di Francia, G ^a   Castaldo, A ^a   Massera, E ^a   Nasti, I ^a,b   Quercia, L ^a   Rea, I ^a  

^a ENEA CR Portici   (Italy)

^b ENEA RC   (Italy)

Author keywords

Aging; Diode; Humidity; Porous silicon; RH

Indexed keywords

AMBIENT AIR; RELATIVE HUMIDITY (RH);

AGING OF MATERIALS; ATMOSPHERIC HUMIDITY; DIODES; NITROGEN COMPOUNDS; SENSORS;

POROUS SILICON;

EID: 25144477029     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.06.048     Document Type: Conference Paper

References (15)

1. Z.M. Rittersma Recent achievements in miniaturised humidity sensors - a review of transduction techniques Sens. Actuators A 96 2002 196 210
2. M. Tencer, and J.S. Moss Humidity management of outdoor electronic equipment: method, pitfalls and recommendation IEEE Trans. Components Packaging Technol. I 25 2002 66 72
3. G.I. Vorobets, O.P. Zhuk, O.E. Ilarianov, V.S. Tanasyuk, and P.M. Shpatar Measurement of air humidity inside electronic devices Instrum. Exp. Tech. 44 2 2001 266 268
4. G.J.W. Visscher J.G. Vebster Measurement, Instrumentation and Sensors Handbook 2000 CRC Press LCC Chapter 72
5. K. Carr-Brion Moisture Sensors in Process Control 1986 Elsevier Applied Science Publishers London/New York
6. J.M. Ingram, M. Greb, J.A. Nicholson, and A.W. Fountain III Polymeric humidity sensor based on laser carbonised polyimide substrate Sens. Actuators B 96 2003 283 289
7. L.H. Mai, P.T.M. Hoa, N.T. Binh, N.T.T. Ha, and D.K. An Some investigation results of the instability of humidity sensors based on alumina and porous silicon materials Sens. Actuators B 66 2000 63 65
8. G.M. O' Halloran, W. van der Vlist, P.M. Sarro, and P.J. French Influence of the formation parameters on the humidity sensing characteristics of a capacitive humidity sensor based on porous silicon Proceedings of the Eurosensors XIII The Hague, The Netherlands, September 12-15 1999 117 120
9. J.J. Mareš, J. Krištofik, and E. Hulicius Influence of humidity on transport in porous silicon Thin Solid Films 255 1995 272 275
10. D.G. Yarkin Charge carrier transport in thermally oxidized metal/PS/p-Si and metal/PS/n-Si structures Semicond. Sci. Technol. 19 2004 100 105
11. 2 Appl. Phys. Lett. 82 10 2003 1595 1597
12. T.D. Dzhafarov, B.C. Omur, C. Oruc, and Z.A. Allahverdiev Hydrogen sensing characteristics of Cu-PS-Si structures J. Phys. D: Appl. Phys. 35 2002 3122 3126
13. 2 sensor Sens. Actuators B 102 2 2004 195 197
14. K. Molnár, T. Mohacsy, A.H. Abdulhadi, J. Volk, and I. Barsony On the nature of metal-porous Si-single crystal silicon (MPS) diodes Phys. Stat. Sol. (a) 197 2 2003 446 451
15. R.M. Vadjikar, A.N. Chandorkar, D. Sharma, and S. Venkatachalam Computational modelling of nanostructured porous silicon Nanostruct. Mater. 5 1 1995 87 94