Investigation on structure and properties of arc-evaporated HfAlN hard coatings

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 28, Issue 4, 2010, Pages 528-535

  Franz, R ^a   Mitterer, C ^a   Lechthaler, M ^b   Polzer, C ^c  

^a UNIVERSITY OF LEOBEN   (Austria)

^b Balzers AG   (Liechtenstein)

^c PLANSEE COMPOSITE MATERIALS GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIENT AIR; ANNEALING IN VACUUM; BALL-ON-DISK; CATHODIC ARC EVAPORATION; COEFFICIENT OF FRICTIONS; FACE CENTERED CUBIC STRUCTURE; FCC PHASE; GROWTH CONDITIONS; MONOCLINIC HFO; ONSET TEMPERATURE; OXIDE PHASE; PREFERRED ORIENTATIONS; STRUCTURAL INVESTIGATION; STRUCTURE AND PROPERTIES; TEMPERATURE RANGE; TESTING TEMPERATURE; TRIBOLOGICAL PROPERTIES; WEAR PERFORMANCE; XRD;

HAFNIUM; HAFNIUM COMPOUNDS; HARD COATINGS; MECHANICAL PROPERTIES; RAMAN SPECTROSCOPY; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

CRYSTAL STRUCTURE;

EID: 77954190371     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3425804     Document Type: Conference Paper

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