Onset of shadowing-dominated growth in glancing angle deposition

Applied Physics Letters

Volumn 91, Issue 17, 2007, Pages

  Amassian, Aram ^a,d   Kaminska, Kate ^b,e   Suzuki, Motofumi ^c   Martinu, Ludvik ^a   Robbie, Kevin ^b  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b QUEEN S UNIVERSITY   (Canada)

^c KYOTO UNIVERSITY   (Japan)

^d Cornell University   (United States)

^e NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; NUCLEATION; POROSITY; THIN FILMS;

AMORPHOUS THIN FILMS; CONTINUOUS FILMS; MOUNDED SURFACE MORPHOLOGIES; NANOPILLARS; SHADOWING INSTABILITIES; VAPOR FLUX;

AMORPHOUS FILMS;

EID: 35548966629     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2794420     Document Type: Article

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