Periodic submicrometer structures by sputtering

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 5, 2001, Pages 1813-1819

  Dick, B ^a   Brett, M J ^a   Smy, T ^b   Belov, M ^a   Freeman, M R ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

^b CARLETON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRON BEAMS; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION;

PERIODIC SUBMICROMETER STRUCTURES;

FILM GROWTH;

EID: 0035440742     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1396644     Document Type: Article

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