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Volumn 49, Issue 3 PART 1, 2010, Pages

Deposition of amorphous zinc indium tin oxide and indium tin oxide films on flexible poly(ether sulfone) substrate using rf magnetron co-sputtering system

(6) Heo, Gi Seok a Yuji Matsumoto, b Gim, In Gi a Park, Jong Woon a Kim, Gwang Young a Kim, Tae Won a

a Korea Institute of Industrial Technology (South Korea)

b TOKYO INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS PHASE; COMBINATORIAL TECHNIQUES; EXTERNAL DYNAMICS; FLEXIBLE ORGANIC LIGHT - EMITTING DIODES; FLEXIBLE SUBSTRATE; INDIUM TIN OXIDE; INDIUM TIN OXIDE FILMS; ITO FILMS; MECHANICAL DURABILITY; OPTICAL TRANSMITTANCE; ORGANIC SOLAR CELL; POLY(ETHER SULFONE); RF-MAGNETRON CO-SPUTTERING; ROOM TEMPERATURE; VISIBLE REGION; ZINC CONTENT;

AMORPHOUS FILMS; ETHERS; INDIUM; ITO GLASS; LIGHT EMITTING DIODES; MAGNETRONS; ORGANIC COMPOUNDS; ORGANIC LIGHT EMITTING DIODES (OLED); PHOTOLITHOGRAPHY; SOLAR CELLS; STRESSES; SUBSTRATES; TIN; TITANIUM COMPOUNDS; ZINC;

OXIDE FILMS;

EID: 77953989577 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.49.035801 Document Type: Article

Times cited : (5)

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