Integration of SWNT film into MEMS for a micro-thermoelectric device

Smart Materials and Structures

Volumn 19, Issue 7, 2010, Pages

  Dau, Van Thanh ^a   Dao, Dzung Viet ^a   Yamada, Takeo ^b   Tung, Bui Thanh ^a   Hata, Kenji ^b   Sugiyama, Susumu ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNED SINGLE-WALLED CARBON NANOTUBES; CNT FILMS; MICRO-ELECTRICAL MECHANICAL SYSTEMS; ROOM-TEMPERATURE CONDITIONS; THERMOELECTRIC DEVICES; TOP-DOWN FABRICATION;

CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; ELECTRON BEAMS; FILM GROWTH; SINGLE-WALLED CARBON NANOTUBES (SWCN); THERMOCOUPLES; WATER VAPOR;

GOLD;

EID: 77953805103     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/19/7/075003     Document Type: Article

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