Structural and mechanical responses of (Zr,Al)N/ZrB2 superlattice coatings to elevated-temperature annealing

Materials Science and Engineering: A

Volumn 423, Issue 1-2, 2006, Pages 116-120

  Li, D J ^a   Wang, M X ^a   Zhang, J J ^a  

^a TIANJIN NORMAL UNIVERSITY   (China)

Author keywords

Magnetron sputtering; Nanoscale multilayer; Superlattice; Thermal stability

Indexed keywords

ALUMINUM; ANNEALING; CHARACTERIZATION; COATINGS; MAGNETRON SPUTTERING; MULTILAYERS; POLYCRYSTALLINE MATERIALS; RESIDUAL STRESSES; THERMODYNAMIC STABILITY; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM COMPOUNDS;

ELEVATED-TEMPERATURE ANNEALING; LOW-ANGLE X-RAY REFLECTION; NANOINDENTATION; NANOSCALE MULTILAYER; SUPERLATTICE COATINGS;

SUPERLATTICES;

ALUMINUM; ANNEALING; CHARACTERIZATION; COATINGS; MAGNETRON SPUTTERING; MULTILAYERS; POLYCRYSTALLINE MATERIALS; RESIDUAL STRESSES; SUPERLATTICES; THERMODYNAMIC STABILITY; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM COMPOUNDS;

EID: 33646139651     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2005.11.068     Document Type: Article

References (14)

1. Helmersson U., Todorova S., Barnett S.A., Sundgren J.E., Markert L.C., and Greene J.E. J. Appl. Phys. 62 (1987) 481-484
2. Barnett S.A., and Shinn M. Ann. Rev. Mater. Sci. 24 (1994) 481-488
3. Greer A.L. Defect Diffus. Forum 557 (1997) 143-147
4. Hultman L., Engström C., and Odén M. Surf. Coat. Technol. 227 (2000) 133-134
5. Engström C., Madan A., Birch J., Nastasi M., Hultman L., and Barnett S.A. J. Mater. Res. 15 (2000) 554-559
6. Blando E., and Hübler R. Surf. Coat. Technol. 158-159 (2002) 685-689
7. Hovsepian P.E., and Munz W.D. Vacuum 69 (2003) 27-36
8. Lee K.W., Chen Y.H., Chung Y.W., and Keer L.M. Surf. Coat. Technol. 177-178 (2004) 591-596
9. Martin K.J., Madan A., Hoffman D., Ji J., and Barnett S.A. J. Vac. Sci. Technol. A 23 (2005) 90-98
10. Holleck H. J. Vac. Sci. Technol. A 4 (1986) 2661-2669
11. Kramer B.M., and Judd P.K. J. Vac. Sci. Technol. A 3 (1985) 2439-2444
12. Powder Diffraction File (International Centre for Diffraction Data, PA, 2000).
13. Hall E.O. Proc. Phys. Soc. Lond. 64B (1951) 747
14. Ohring M. The Materials Science of Thin Films (1992), Academic Press, New York p. 416