Comparative study of metal/amorphous-carbon multilayer structures produced by magnetron sputtering

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 1008-1012

  Bertran, E ^a   Corbella, C ^a   Pinyol, A ^a   Vives, M ^a   Andujar J L ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Amorphous carbon; Mechanical properties; Sputtering; X ray diffraction

Indexed keywords

AMORPHOUS MATERIALS; CARBON; ELECTRIC POTENTIAL; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

MULTILAYER STRUCTURES;

MULTILAYERS;

DIAMOND;

EID: 0037846248     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00303-5     Document Type: Article

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