Optimization of pulsed laser atom probe (PLAP) for the analysis of nanocomposite Ti-Si-N films

Ultramicroscopy

Volumn 110, Issue 7, 2010, Pages 836-843

  Tang, Fengzai ^a   Gault, Baptiste ^b   Ringer, Simon P ^a   Cairney, Julie M ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

^b UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

Nanocomposites; Pulsed laser atom probe (PLAP); Titanium silicon nitride (TiSiN); Transmission electron microscope (TEM)

Indexed keywords

ATOM PROBE; PULSED LASER; TITANIUM-SILICON-NITRIDE; TRANSMISSION ELECTRON MICROSCOPE;

ATOMS; ELECTRON MICROSCOPES; NANOCOMPOSITES; OPTIMIZATION; PROBES; PULSED LASER APPLICATIONS; SILICON NITRIDE; TITANIUM; TITANIUM NITRIDE; TOMOGRAPHY; TRANSMISSION ELECTRON MICROSCOPY;

PULSED LASERS;

NANOCOMPOSITE; NITROGEN; SILICON; TITANIUM;

ACCURACY; ANALYTIC METHOD; ARTICLE; CHEMICAL COMPOSITION; CORRELATION ANALYSIS; IMAGE RECONSTRUCTION; OPTICAL RESOLUTION; PERFORMANCE MEASUREMENT SYSTEM; PROCESS OPTIMIZATION; PULSED LASER ATOM PROBE TOMOGRAPHY; SENSITIVITY ANALYSIS; TEMPERATURE SENSITIVITY; TOMOGRAPHY; TRANSMISSION ELECTRON MICROSCOPY; ULTRASTRUCTURE;

EID: 77953537616     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ultramic.2010.03.003     Document Type: Article

References (32)

1. Christiansen S., Albrecht M., Strunk H.P., Veprek S. J. Vac. Sci. Technol. B 1998, 16:19.
2. Veprek S., Veprek-Heijman M.G.J., Karvankova P., Prochazka J. Thin Solid Films 2005, 476:1.
3. Patscheider J., Zehnder T., Diserens M. Surf. Coat. Technol. 2001, 146-147:201.
4. M.K. Miller, A. Cerezo, M.G. Hetherington, G.D.W. Smith, Atom probe field-ion microscopy, Oxford, New York, 1996.
5. Cerezo A., Godfrey T.J., Smith G.D.W. Rev. Sci. Instrum. 1988, 59:862.
6. Blavette D., Deconihout B., Bostel A., Sarrau J.M., Bouet M., Menand A. Rev. Sci. Instrum. 1993, 64:2911.
7. Kelly T.F., Miller M.K. Rev. Sci. Instrum. 2007, 78:031101.
8. Skogsmo J., Lindblad P., Norden H. J. Phys. (Paris) 1986, 47(C7):251.
9. Ai C.F., Wu J.Y., Lee C.S. Vacuum 1993, 44:99.
10. Kellogg G., Tsong T.T. J. Appl. Phys. 1980, 51:1184.
11. Gault B., Vurpillot F., Vella A., Gilbert M., Menand A., Blavette D., Deconihout B. Rev. Sci. Instrum. 2006, 77:043705.
12. Cerezo A., Smith G.D.W., Clifton P.H. Appl. Phys. Lett. 2006, 88:154103.
13. Bunton J.H., Olson J.D., Lenz D.R., Kelly T.F. Microsc. Microanal. 2007, 13:418.
14. Oberdorfer C., Stender P., Reinke C., Schmitz G. Microsc. Microanal. 2007, 13:342.
15. Prosa T.J., Keeney S.K., Kelly T.F. Microsc. Microanal. 2007, 13:190.
16. Kelly T.F., Larson D.J., Thompson K., Alvis R.L., Bunton J.H., Olso J.D., Gorman B.P. Annu. Rev. Mater. Res. 2007, 37:681.
17. Larson D.J., Foord D.T., Petford-Long A.K., Anthony T.C., Rozdilsky I.M., Cerezo A., Smith G.W.D. Ultramicroscopy 1998, 75:147.
18. Miller M.K., Russell K.F., Thompson K., Alvis R., Larson D.J. Microsc. Microanal. 2007, 13:428.
19. Bendavid A., Martin P.J., Preston E.W., Cairney J., Xie Z.H., Hoffman M. Surf. Coat. Technol. 2006, 201:4139.
20. Saxey D.W., Cairney J.M., McGrouther D., Honma T., Ringer S.P. Ultramicroscopy 2007, 107:756.
21. Rolander U., Andren H.O. J. Phys. (Paris) 1989, C8:371.
22. F. Tang, B. Gault, S.P. Ringer, P. Martin, A. Bendavid, J.M. Cairney, Scripta Mater, in press. doi:10.1016/j.scriptamat.2010.03.050.
23. Jagutzki O., Cerezo A., Czasch A., Dörner R., Hattaß M., Huang M., Mergel V., Spillmann U., Ullmann-Pfleger K., Weber T., Schmidt-Böcking H., Smith G.D.W. IEEE Trans. Nucl. Sci. 2002, 49:2477.
24. Geuser F.D., Gault B., Bostel A., Vurpillot F. Surf. Sci. 2007, 601:536.
25. Tsong T.T. Phys. Rev. Lett. 1985, 55:2826.
26. Stepien Z.M., Tsong T.T. Surf. Sci. 1998, 409:57.
27. Kingham D.R. Surf. Sci. 1982, 116:273.
28. Krishnaswamy S.V., Muller E.W. Rev. Sci. Instrum. 1974, 45:1049.
29. Vurpillot F., Houard J., Vella A., Deconihout B. J. Phys. D: Appl. Phys. 2009, 42:125502.
30. Sha G., Cerezo A., Smith G.D.W. Appl. Phys. Lett. 2008, 92:043503.
31. Perea D.E., Wijaya E., Lensch-Falk J.L., Hemesath E.R., Lauhon L.J. J. Solid State Chem. 2008, 181:1642.
32. Cerezo A., Clifton P.H., Gomberg A., Smith G.D.W. Ultramicroscopy 2007, 107:720.