Structural studies of ZnS thin films grown on GaAs by RF magnetron sputtering

Vacuum

Volumn 84, Issue 10, 2010, Pages 1191-1194

  Gayou, V L ^a,b   Salazar Hernandez, B ^b   Constantino, M E ^b   Andrés, E Rosendo ^c   Diaz T ^c   Macuil, R Delgado ^a   López, M Rojas ^a  

^a INSTITUTO POLITÉCNICO NACIONAL   (Mexico)

^b UNIVERSIDAD AUTÓNOMA DEL ESTADO DE MORELOS   (Mexico)

^c BENEMÉRITA UNIVERSIDAD AUTÓNOMA DE PUEBLA   (Mexico)

Author keywords

AFM; Nanoparticles; Sputtering; XRD; ZnS

Indexed keywords

AFM; DEPOSITED FILMS; DIFFRACTION PEAKS; GAAS; GAAS(001); MIXED PHASIS; RF-MAGNETRON SPUTTERING; SCHERRER FORMULA; STRUCTURAL STUDIES; WURZITE; XRD; XRD ANALYSIS; ZINC BLEND STRUCTURE; ZNS THIN FILMS;

ATOMIC FORCE MICROSCOPY; CRYSTALLITE SIZE; GALLIUM ARSENIDE; MAGNETRON SPUTTERING; NANOPARTICLES; SEMICONDUCTING GALLIUM; THIN FILMS; X RAY DIFFRACTION; ZINC; ZINC SULFIDE;

GALLIUM ALLOYS;

EID: 77953325650     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.10.023     Document Type: Article

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