Determination of layer-thickness variation in periodic multilayer by x-ray reflectivity

Journal of Applied Physics

Volumn 107, Issue 10, 2010, Pages

  Jiang, Hui ^a   Zhu, Jingtao ^a   Xu, Jing ^a   Wang, Xiaoqiang ^a   Wang, Zhanshan ^a   Watanabe, Makoto ^b,c,d  

^a TONGJI UNIVERSITY   (China)

^b SHANGHAI DIANJI UNIVERSITY   (China)

^c School of Chemistry and Chemical Technology   (China)

^d SAGA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION PROCESS; PERIODIC MULTILAYERS; RANDOM FLUCTUATION; SIMULTANEOUS EQUATIONS; STATISTICAL HYPOTHESIS TEST; THICK SUBSTRATES; THICKNESS FLUCTUATIONS; THICKNESS VARIATION; X RAY REFLECTIVITY; X-RAY GRAZING INCIDENCE;

NUMERICAL ANALYSIS; REFLECTION; STATISTICAL TESTS; WAVELET TRANSFORMS; X RAY DIFFRACTION;

MULTILAYERS;

EID: 77952998568     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3383037     Document Type: Article

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